On Oct. 15, Reuters reporters Toby Sterling and Nathan Vifflin reported that ASML was weighing roughly a dozen EUV machines beyond its plan for 110 a year by 2028, while holding off on accepting orders for 2029 and 2030. The possible addition would imply about 122 machines annually if ASML added the full increment; the extra systems were under consideration, not a revised target. Reuters’ report also detailed why the company was assessing future demand before taking later-dated orders.
How much more EUV output is ASML weighing?
The reported figures point to a conditional scenario, not a new production commitment:
| 2028 scenario | EUV systems per year | Calculation |
| Previously described plan | 110 | Annual plan reported by Reuters |
| If the contemplated increment were added | About 122 | 110 + roughly 12 |
ASML said on Oct. 14 that its planned lithography output would fall short of customer demand in both 2027 and 2028. The earlier plan called for a 30% capacity increase in 2027 for Low-NA EUV and immersion DUV, with a further 30% increase in 2028 under investigation. The company was examining capacity beyond that previously discussed 2028 increase, too. Euronews reported the company’s statement. NeoTeo covered the broader demand shortfall in its report on ASML’s third-quarter results.
Why ASML was holding off on orders for 2029 and 2030
ASML chief financial officer Roger Dassen said the company wanted to assess customer readiness and its own ability to supply future demand before accepting orders for those years. He explained that ASML wanted to avoid accepting orders from some customers and later having to tell others that capacity was sold out, Reuters reported.
Capacity measures work on different timelines
The reported response spans assembly, equipment already installed at customer sites, faster scanners and a manufacturing expansion in Eindhoven. The first phase of the Eindhoven expansion was expected to come online in 2029, Reuters reported.
Scanner throughput is a separate measure from the number of systems ASML can produce in a year. Tom’s Hardware reported that the Twinscan NXE:3800F was scheduled for introduction in early 2027, with throughput of up to 260 wafers per hour, compared with 230 for the Twinscan NXE:3800E. A fab’s wafer output also depends on how many lithography exposures each wafer needs and on other equipment in the production process.
