On September 28, 2026, Russia’s Minister of Industry and Trade, Anton Alikhanov, said acceptance testing of the country’s 130 nm lithography machine was scheduled to begin that autumn, with completion planned by the end of the year. He described development as approaching completion.
Laser tests and machine acceptance are separate milestones
Alikhanov said Russian excimer lasers had been tested. These lasers provide the light source for lithography systems; testing them is a separate step from acceptance testing of the complete machine.
The 90 nm project remains at an earlier stage
Alikhanov said the technical assignment for a separate 90 nm scanning photolithography machine had been prepared and an implementer was being selected.
